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ATLEX-300i Short Pulse Excimer Lasers

Supplier: Raymax Lasers

Small is Beautiful - Micromachining for electronics/optronics:-

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OPTEC-ATL

ATLEX-300i short pulse excimer lasers

  • Turnkey excimer laser workstations
  • Made-to-measure industrial solutions
  • Smart beam delivery components
  • Process Knowledge

Systems & Innovative Solutions OPTEC - Belgium

Why Excimer Laser ?

  • Pulsed gas laser (300 Hz)
  • Short wavelenght (193-248nm) in UV range
  • Short pulse duration (4-6ns)
  • High peak power (2-4 MW)
  • Very short absorption length (sub-┬Ám)
  • Very localized and well controlled energy deposition
  • Minimized heat affected zone
  • " Cold ablation " in most polymers

Fundamental Excimer Processes

Melting, Ablation, Exfoliation, Sensitization for Annealing, Thin Film patterning, Photoablative decompostion Surface Evaporation, drilling, grooving, shaping MicroMachining.

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