Vaisala - K‑PATENTS Semicon Refractometer PR-33-S Get latest price

K‑PATENTS Semicon Refractometer PR-33-S

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A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting.

Vaisala K-PATENTS® Semicon Refractometer PR-33-S monitors the fab chemicals' concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).

Features:

• N.I.S.T. traceable calibration, verification with standard R.I. liquids and validated procedure.
• Patented CORE-optics (US Patent No. US6067151). 
• Remote panel via Ethernet for data-logging and remote operation.
• The communication is built by the standard UDP/IP protocols.
• Process temperature range: -20°C – 85°C (-4°F – 185°F).
• Fast process temperature measurement by built-in Pt1000 and automatic digital temperature compensation.

To contact Vaisala about Vaisala K‑PATENTS Semicon Refractometer PR-33-S use Get a quote.

A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting.

Vaisala K-PATENTS® Semicon Refractometer PR-33-S monitors the fab chemicals' concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).

Features:

• N.I.S.T. traceable calibration, verification with standard R.I. liquids and validated procedure.
• Patented CORE-optics (US Patent No. US6067151). 
• Remote panel via Ethernet for data-logging and remote operation.
• The communication is built by the standard UDP/IP protocols.
• Process temperature range: -20°C – 85°C (-4°F – 185°F).
• Fast process temperature measurement by built-in Pt1000 and automatic digital temperature compensation.

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To contact Vaisala about Vaisala K‑PATENTS Semicon Refractometer PR-33-S use Get a quote.

Vaisala PR33S Brochure(0.81MB)