The ABL1500 Air Bearing Positioning Stage, with its fully active preload, exceptionally high stiffness and excellent geometric characteristics provides positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems.
Design Features of the ABL1500 Air Bearing Positioning Stages Include:
Designed for high-performance scanning and inspection
450 mm wafer compatible
Active air preload on all air-bearing surfaces
Linear encoder feedback provides subnanometer resolution
High stiffness for heavy loads and excellent geometric performance
Travel up to 500mm
The ABL1500 linear stage incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.
Proprietary manufacturing techniques result in a linear stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.
The driving force behind the ABL1500 linear stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech's long history and experience as a motor manufacturer is reflected in this design. The BLMC utilises an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.
Lastek | Laser & Optical Based Photonic Technologies
The Lastek Group of Companies was formed in 1988 and operates today from a large, fully-restored factory located in the University of Adelaide's Commerce and Research Precinct at Thebarton, Adelaide, ...