Originally designed for the demands of precision wafer inspection, the WaferMax T has been applied to a multitude of applications. A standard 25mm aperture allows for easy pass-through of vacuum lines where limited rotation is required. If continuous rotation is necessary, an optional single or dual-port rotary union can be incorporated. The tabletop includes a standard mounting pattern that allows for easy wafer-chuck mounting.
Angular contact bearings are used to maximise performance with respect to wobble, moment stiffness and rotating friction. A thick-walled, precision-ground shaft further minimises wobble.
Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.
To maximise positioning performance, the WaferMax T utilises Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.
Performance is assured with a 10,000 lines per revolution encoder that results in 0.065arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.
Design Features of the WaferMax TRotary Stages include:
Low profile for space-conscious applications
Direct-drive, brushless, slotless servomotor
Direct-coupled, high-accuracy rotary encoder
Optional rotary union for vacuum
Lastek | Laser & Optical Based Photonic Technologies
The Lastek Group of Companies was formed in 1988 and operates today from a large, fully-restored factory located in the University of Adelaide's Commerce and Research Precinct at Thebarton, Adelaide, South Australia. The Group offers a unique set of laser and optical technological resources to the Australian and New Zealand photonics industry. With a staff of over fifteen employees, Lastek brings together a wealth of experience in lasers, optics and complementary technologies.
Lastek is the leading distributor in Australia and New Zealand for many of the world's most advanced laser and photonics companies. Our sales and service personnel, including 3 PhDs, are the most experienced in the industry. We support customers in leading edge applications in diverse fields. These range from fundamental research in physics, chemistry, engineering and biology, to industrial applications of photonics technology, to advanced microscopy and imaging systems, and spectroscopy.
The Groups activities are diverse: in addition to the supply and support of advanced laser and optical equipment; we design and manufacture optical instruments and we undertake custom design and optical project management for a wide range of customers and applications.
Well-equipped workshops and laboratories allow Lastek to undertake design and development tasks, system integration and custom manufacturing project. With in-house expertise in areas as diverse as software development, optical system design, high voltage electronics, opto-mechanical design and fabrication, Lastek have the experience and capabilities to develop advanced optical products, from prototyping to market release.