Originally designed for the demands of precision wafer inspection, the WaferMax T has been applied to a multitude of applications. A standard 25mm aperture allows for easy pass-through of vacuum lines where limited rotation is required. If continuous rotation is necessary, an optional single or dual-port rotary union can be incorporated. The tabletop includes a standard mounting pattern that allows for easy wafer-chuck mounting.
Angular contact bearings are used to maximise performance with respect to wobble, moment stiffness and rotating friction. A thick-walled, precision-ground shaft further minimises wobble.
Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.
To maximise positioning performance, the WaferMax T utilises Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.
Performance is assured with a 10,000 lines per revolution encoder that results in 0.065arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.
Design Features of the WaferMax TRotary Stages include:
Low profile for space-conscious applications
Direct-drive, brushless, slotless servomotor
Direct-coupled, high-accuracy rotary encoder
Optional rotary union for vacuum
Lastek | Laser & Optical Based Photonic Technologies
The Lastek Group of Companies was formed in 1988 and operates today from a large, fully-restored factory located in the University of Adelaide's Commerce and Research Precinct at Thebarton, Adelaide, ...